Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494220 | Apparatus for cleaning a substrate such as a semiconductor wafer | Naoki Matsuda, Kenya Ito | 2002-12-17 |
| 6368493 | Electrolytic machining method and apparatus | Yuzo Mori, Takayuki Saito, Yasushi Toma, Akira Fukunaga, Itsuki Kobata | 2002-04-09 |