Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494985 | Method and apparatus for polishing a substrate | Hiroshi Sotozaki | 2002-12-17 |
| 6439962 | Cleaning apparatus | — | 2002-08-27 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494985 | Method and apparatus for polishing a substrate | Hiroshi Sotozaki | 2002-12-17 |
| 6439962 | Cleaning apparatus | — | 2002-08-27 |