Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464472 | Circulation fan apparatus and circulation-fan driving motor | Shinichi Sekiguchi, Toshimitsu Barada, Toshiharu Nakazawa, Takeshi Kawamura | 2002-10-15 |
| 6464825 | Substrate processing apparatus including a magnetically levitated and rotated substrate holder | — | 2002-10-15 |
| 6440320 | Substrate processing method and apparatus | — | 2002-08-27 |
| 6373159 | Substrate rotating apparatus | — | 2002-04-16 |
| 6366039 | Excimer laser device | Shinichi Sekiguchi, Toshimitsu Barada, Toshiharu Nakazawa | 2002-04-02 |
| 6346757 | Magnetic bearing controller | — | 2002-02-12 |