Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468030 | Turbo-molecular pump | — | 2002-10-22 |
| 6409468 | Turbo-molecular pump | — | 2002-06-25 |
| 6382249 | Vacuum exhaust system | Hiroshi Sobukawa | 2002-05-07 |
| 6343910 | Turbo-molecular pump | Hiroshi Sobukawa | 2002-02-05 |