Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497803 | Unbalanced plasma generating apparatus having cylindrical symmetry | Mark Romach | 2002-12-24 |
| 6432286 | Conical sputtering target | — | 2002-08-13 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497803 | Unbalanced plasma generating apparatus having cylindrical symmetry | Mark Romach | 2002-12-24 |
| 6432286 | Conical sputtering target | — | 2002-08-13 |