Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495796 | High density energy beam machining method and apparatus for the same | Terukazu Fukaya, Takashi Nakayama, Michio Kameyama, Seiji Tachibana | 2002-12-17 |
| 6429506 | Semiconductor device produced by dicing | Tetsuo Fujii, Tsuyoshi Fukada, Hiroshi Muto, Kenichi Ao, Shinji Yoshihara | 2002-08-06 |