Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6438856 | Apparatus for fine positioning of a component, and coordinate measuring machine having an apparatus for fine positioning of a component | — | 2002-08-27 |
| 6441899 | Apparatus and method for loading substrates of various sizes into substrate holders | Carola Blaesing-Bangert | 2002-08-27 |
| 6441911 | Measuring instrument and method for measuring patterns on substrates of various thicknesses | — | 2002-08-27 |
| 6377870 | Device and method for delivering various transparent substrates into a high-precision measuring instrument | Carola Blaesing-Bangert | 2002-04-23 |
| 6347458 | Displaceable X/Y coordinate measurement table | — | 2002-02-19 |