Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448666 | Semiconductor device and method for forming insulating film | Rika Shinohara | 2002-09-10 |
| 6420261 | Semiconductor device manufacturing method | — | 2002-07-16 |
| 6417116 | Semiconductor device having a multilayer interconnection structure | Masanobu Ikeda, Kenichi Watanabe, Yoshiyuki Ohkura | 2002-07-09 |
| 6344363 | Method of making ferroelectric film with protective cover film against hydrogen and moisture | Rika Shinohara, Atsuhiro Tsukune | 2002-02-05 |