RM

Richard G. Morton

CY Cymer: 3 patents #8 of 41Top 20%
📍 Richland, WA: #3 of 77 inventorsTop 4%
🗺 Washington: #254 of 3,602 inventorsTop 8%
Overall (2002): #22,281 of 266,432Top 9%
3
Patents 2002

Issued Patents 2002

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
6466602 Gas discharge laser long life electrodes Vladimir B. Fleurov, Michael C. Cates, Michael Du'Lyea, Igor V. Fomenkov, Dmitri V. Gaidarenko +4 more 2002-10-15
6414979 Gas discharge laser with blade-dielectric electrode Richard C. Ujazdowski, Michael C. Cates, Jean-Marc Hueber, Ross H. Winnick 2002-07-02
6363094 Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effects Jean-Marc Hueber 2002-03-26