Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449420 | Germanium silicon oxynitride high index films for planar waveguides | Ikerionwu Akwani, Thomas P. Grandi, Paul Arthur Sachenik | 2002-09-10 |
| 6408125 | Germanium silicon oxynitride high index films for planar waveguides | Ikerionwu Akwani, Thomas P. Grandi, Paul Arthur Sachenik | 2002-06-18 |
| 6403286 | High aspect ratio patterning of glass film | Ljerka Ukrainczyk | 2002-06-11 |