Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429034 | Method of making high aspect ratio features during surface micromachining | Minfan Pai, J. Greg Couillard | 2002-08-06 |
| 6338249 | Electrothermally actuated vibromotor | Minfan Pai | 2002-01-15 |