Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435033 | Process for manufacturing a microsystem with a flexible membrane for a pressure sensor | — | 2002-08-20 |
| 6431005 | Microsystem with a flexible membrane pressure sensor | — | 2002-08-13 |
| 6392158 | Structure equipped with electric contacts formed through said structure substrate and method for obtaining said structure | Stéphane Caplet | 2002-05-21 |