Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465327 | Method for producing a thin membrane and resulting structure with membrane | Bernard Aspar, Michel Bruel, Chrystelle Lagahe | 2002-10-15 |
| 6465855 | Micromachined structure with a deformable membrane and method for making same | Jean-Frederic Clerc | 2002-10-15 |