Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479210 | Chemically amplified resist composition | Yoshiaki Kinoshita, Satoru Funato | 2002-11-12 |
| 6358665 | Radiation-sensitive composition of chemical amplification type | Georg Pawlowski, Hiroshi Okazaki, Yoshiaki Kinoshita, Naoko Tsugama, Aritaka Hishida +1 more | 2002-03-19 |