Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464344 | Microstructured element and method for producing the same | — | 2002-10-15 |
| 6368729 | Tungsten film, method of manufacturing the same, and thin-film heater | Etsuo Yamamoto, Yoshimasa Shirai, Hiroshi Ikeda | 2002-04-09 |