Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451120 | Apparatus and method for batch processing semiconductor substrates in making semiconductor lasers | Kevin J. Hubbard, Mark McElhinney, Scott Wayne Priddy | 2002-09-17 |
| 6367267 | Integrated phase separator for ultra high vacuum system | — | 2002-04-09 |