Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461969 | Multiple-step plasma etching process for silicon nitride | Wen-Jun Liu, Mei Sheng Zhou | 2002-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461969 | Multiple-step plasma etching process for silicon nitride | Wen-Jun Liu, Mei Sheng Zhou | 2002-10-08 |