Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443809 | Polishing apparatus and method for forming an integrated circuit | Lup San Leong, Feng Chen | 2002-09-03 |
| 6376378 | Polishing apparatus and method for forming an integrated circuit | Feng Chen, Lup San Leong | 2002-04-23 |