Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460404 | Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool | Soon Chye Chan, Chun Pheng Tan | 2002-10-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6460404 | Apparatus and method for detecting bad edge bead removal in a spin-on-glass coater tool | Soon Chye Chan, Chun Pheng Tan | 2002-10-08 |