Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441886 | Illumination optical system and exposure apparatus having the same | Akiyoshi Suzuki | 2002-08-27 |
| 6417940 | Phase type computer hologram and optical instrument | — | 2002-07-09 |