Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6457359 | Apparatus and methods for measuring stress in a specimen including a thin membrane | — | 2002-10-01 |
| 6459090 | Reticles for charged-particle-beam microlithography that exhibit reduced warp at pattern-defining regions, and semiconductor-device-fabrication methods using same | — | 2002-10-01 |