Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488769 | Fluoride refining method and fluoride crystal manufacturing method, and optical part and aligner using same | — | 2002-12-03 |
| 6342312 | Calcium fluoride crystal, optical article and exposure apparatus for photo-lithography using the same | Toshio Ichizaki | 2002-01-29 |