Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472795 | Electrostatic actuator and method of driving the same | Futoshi Hirose, Takayuki Yagi | 2002-10-29 |
| 6459088 | Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same | Shunichi Shido, Junichi Seki | 2002-10-01 |