Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6390903 | Precise polishing apparatus and method | Kazuo Takahashi, Mikichi Ban, Shinzo Uchiyama, Takashi Kamono | 2002-05-21 |
| 6352469 | Polishing apparatus with slurry screening | Kyoichi Miyazaki, Kazuo Takahashi | 2002-03-05 |