MO

Masahiko Okunuki

Canon: 1 patents #1,147 of 2,505Top 50%
📍 Akiruno, JP: #4 of 7 inventorsTop 60%
Overall (2002): #159,205 of 266,432Top 60%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6465797 Electron beam illumination apparatus, electron beam exposure apparatus, and device manufacturing method — 2002-10-15