Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493170 | Interference device and position detection device using the same | Shigeki Kato | 2002-12-10 |
| 6473184 | Interferometer which divides light beams into a plurality of beams with different optical paths | Hidejiro Kadowaki, Yasushi Kaneda, Shigeki Kato, Takayuki Kadoshima, Sakae Horyu | 2002-10-29 |