Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495461 | Process for forming amorphous titanium silicon nitride on substrate | Kazuya Masu, Hideki Matsuhashi | 2002-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495461 | Process for forming amorphous titanium silicon nitride on substrate | Kazuya Masu, Hideki Matsuhashi | 2002-12-17 |