Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483989 | Substrate processing apparatus and semiconductor device producing method | Satoshi Okada, Michiko Nishiwaki, Katsuhisa Kasanami | 2002-11-19 |
| 6472639 | Heat treatment method and heat treatment apparatus | Katsuhisa Kasanami, Naoko Matsuyama, Shinya Sasaki | 2002-10-29 |
| 6414280 | Heat treatment method and heat treatment apparatus | Katsuhisa Kasanami, Naoko Matsuyama, Shinya Sasaki | 2002-07-02 |