Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6392310 | Semiconductor device having a reduced leakage current and a fabrication process thereof | — | 2002-05-21 |
| 6376388 | Dry etching with reduced damage to MOS device | Koichi Hashimoto, Masaaki Aoyama | 2002-04-23 |