Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461094 | Loading and unloading station for semiconductor processing installations | Andreas Mages, Werner Scheler, Alfred Schulz, Heinz Schneider | 2002-10-08 |
| 6375403 | Loading and unloading station for semiconductor processing installations | Andreas Mages, Werner Scheler, Alfred Schulz, Heinz Schneider | 2002-04-23 |