Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485250 | Substrate transport apparatus with multiple arms on a common axis of rotation | — | 2002-11-26 |
| 6481956 | Method of transferring substrates with two different substrate holding end effectors | — | 2002-11-19 |
| 6364592 | Small footprint carrier front end loader | — | 2002-04-02 |
| 6364593 | Material transport system | Glenn Sindledecker | 2002-04-02 |