Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475456 | Silicon carbide film and method for manufacturing the same | Yukitaka Nakano, Kuniaki Yagi, Takamitsu Kawahara | 2002-11-05 |
| 6416578 | Silicon carbide film and method for manufacturing the same | Yukitaka Nakano, Kuniaki Yagi, Takamitsu Kawahara | 2002-07-09 |