Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440619 | Method of distortion compensation by irradiation of adaptive lithography membrane masks | — | 2002-08-27 |
| 6404481 | Adaptive lithography membrane masks | Henry I. Smith, Ken Murooka, Michael H. Lim | 2002-06-11 |