Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387578 | Post-exposure heat treatment to reduce surface roughness of PMMA surfaces formed by radiation lithography | Zhong-Geng Ling | 2002-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387578 | Post-exposure heat treatment to reduce surface roughness of PMMA surfaces formed by radiation lithography | Zhong-Geng Ling | 2002-05-14 |