Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482553 | Graphite mask for x-ray or deep x-ray lithography | Jost S. Göttert, Philip J. Coane | 2002-11-19 |
| 6415860 | Crossflow micro heat exchanger | Chad R. Harris, Mircea Despa | 2002-07-09 |