Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461085 | Sputter pallet loader | Johann F. Adam | 2002-10-08 |
| 6438781 | Washer for cleaning substrates | Joseph L. Ritchey, Jr., Johann F. Adam | 2002-08-27 |
| 6430114 | Self-lubricating layer for a data storage disk | Po-Wen Wang, Olu Atanda | 2002-08-06 |
| 6342707 | Laser scatterometer with adjustable beam block | Johann F. Adam | 2002-01-29 |