Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6481955 | Vacuum treatment equipment | — | 2002-11-19 |
| 6453543 | Transport and transfer device | Peter Tinner, Josef Marthy, Stephan Voser | 2002-09-24 |
| 6454908 | Vacuum treatment system | Martin Dubs | 2002-09-24 |
| 6416640 | Sputter station | — | 2002-07-09 |
| 6364955 | Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method | — | 2002-04-02 |