YH

Yongzhang Huang

AT Axcelis Technologies: 1 patents #2 of 19Top 15%
📍 Yachiyo, MA: #1 of 1 inventorsTop 100%
Overall (2002): #86,647 of 266,432Top 35%
1
Patents 2002

Issued Patents 2002

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6441382 Deceleration electrode configuration for ultra-low energy ion implanter — 2002-08-27