Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492186 | Method for detecting an endpoint for an oxygen free plasma process | Qingyan Han, Palani Sakthivel, Ricky Ruffin | 2002-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492186 | Method for detecting an endpoint for an oxygen free plasma process | Qingyan Han, Palani Sakthivel, Ricky Ruffin | 2002-12-10 |