Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439968 | Polishing pad having a water-repellant film theron and a method of manufacture therefor | — | 2002-08-27 |
| 6406609 | Method of fabricating an integrated circuit | Jennifer S. Obeng | 2002-06-18 |
| 6365503 | Method of improving electromigration in semiconductor device manufacturing processes | Jia-Sheng Huang, Seung H. Kang, Anthony Oates | 2002-04-02 |