Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420194 | Method for extracting process determinant conditions from a plurality of process signals | — | 2002-07-16 |
| 6367329 | Acoustic time of flight and acoustic resonance methods for detecting endpoint in plasma processes | Gardy Cadet | 2002-04-09 |