Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372393 | Process for fabricating a projection electron lithography mask and a removable, reusable cover for use therein | Carlos G. Caminos, Chester S. Knurek | 2002-04-16 |
| 6368753 | Mask repair | Lloyd R. Harriott | 2002-04-09 |