Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6480260 | Mask clamping apparatus, e.g. for a lithographic apparatus | Sjoerd Nicolaas Lambertus Donders | 2002-11-12 |
| 6413701 | Lithographic projection apparatus | Hans Jansen | 2002-07-02 |