Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473161 | Lithographic projection apparatus, supporting assembly and device manufacturing method | Frank Auer, Robertus Nicodemus Jacobus Van Ballegoij | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473161 | Lithographic projection apparatus, supporting assembly and device manufacturing method | Frank Auer, Robertus Nicodemus Jacobus Van Ballegoij | 2002-10-29 |