Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6441975 | Device for the low-deformation support of an optical element and method for the low-deformation support of the optical element | Michael J. Ebert, Franz Sorg, Michael Trunz, Frank Marianek, Markus Kasparek | 2002-08-27 |