Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498350 | Crash prevention in positioning apparatus for use in lithographic projection apparatus | Yim-Bun Patrick Kwan, Andreas Ariens, Edwin Johan Buis, Jan Frederick Hoogkamp, Robert-Han Munnig Schmidt | 2002-12-24 |
| 6392738 | Lithographic projection apparatus | Aschwin Lodewijk Hendricus Johannes Van Meer, Franciscus Adrianus Gerardus Klaassen | 2002-05-21 |