Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6388823 | Optical system, especially a projection light facility for microlithography | Erwin Gaber, Christian Wagner, Hubert Holderer, Michael Gerhard, Erich Merz +1 more | 2002-05-14 |