Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411426 | Apparatus, system, and method for active compensation of aberrations in an optical system | Michael F. Meehan, David Taub | 2002-06-25 |
| 6398373 | Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems | Andrew Guzman, Carlo La Fiandra, Ronald P. Sidor, Michael L. Nelson | 2002-06-04 |