Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439154 | Plasma processing apparatus for semiconductors | Baiei Kono | 2002-08-27 |
| 6413887 | Method for producing silicon nitride series film | Hiroki Arai | 2002-07-02 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439154 | Plasma processing apparatus for semiconductors | Baiei Kono | 2002-08-27 |
| 6413887 | Method for producing silicon nitride series film | Hiroki Arai | 2002-07-02 |