Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499317 | Synthetic quartz glass and method for production thereof | Shinya Kikugawa, Noriaki Shimodaira, Akio Masui, Shuhei Yoshizawa | 2002-12-31 |
| 6475575 | Pellicle and method for manufacture thereof | Shinya Kikugawa, Hitoshi Mishiro, Hiroshi Arishima, Kaname Okada, Katsuhiro Matsumoto | 2002-11-05 |